Characterization of a cold cathode Penning ion source for the implantation of noble gases beneath 2D monolayers on metals: Ions and neutrals
- Cun, Huanyao Physik-Institut, Universität Zürich, Winterthurerstrasse 190, CH-8057 Zürich, Switzerland
- Spescha, Annina Physik-Institut, Universität Zürich, Winterthurerstrasse 190, CH-8057 Zürich, Switzerland
- Schuler, Adrian Physik-Institut, Universität Zürich, Winterthurerstrasse 190, CH-8057 Zürich, Switzerland
- Hengsberger, Matthias Physik-Institut, Universität Zürich, Winterthurerstrasse 190, CH-8057 Zürich, Switzerland
- Osterwalder, Jürg Physik-Institut, Universität Zürich, Winterthurerstrasse 190, CH-8057 Zürich, Switzerland
- Greber, Thomas Physik-Institut, Universität Zürich, Winterthurerstrasse 190, CH-8057 Zürich, Switzerland
Published in:
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. - American Vacuum Society. - 2016, vol. 34, no. 2, p. 020602
- Language
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- English
- Open access status
- green
- Identifiers
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- DOI 10.1116/1.4939507
- ISSN 0734-2101
- Persistent URL
- https://susi.usi.ch/global/documents/256115
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